Dynamic growth effects during low-pressure deposition of diamond films
作者:
Donald R. Gilbert,
Rajiv Singh,
Roy Clarke,
S. Murugkar,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 70,
issue 15
页码: 1974-1976
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.118796
出版商: AIP
数据来源: AIP
摘要:
Diamond films were deposited in a modified electron–cyclotron-resonance plasma system operating at pressures between 1.0 and 2.0 Torr. This system provides the advantage of efficient plasma generation due to magnetic enhancement and high diffusion rates due to relatively low-pressure operation. Films were formed from preexisting seed layers providing high “nucleation” densities to promote rapid coalescence. Raman analysis of grown films showed a quality dependence on both deposition pressure and nucleation density. We speculate that the increased presence of amorphous carbon and larger film stresses is the result of grain-boundary impurity effects in the seeded films. Oxygen addition improved film quality by reducing nondiamond carbon incorporation. ©1997 American Institute of Physics.
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