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Overview of CD‐SEM — and beyond

 

作者: David C. Joy,  

 

期刊: AIP Conference Proceedings  （AIP Available online 1903）
卷期: Volume 683, issue 1  

页码: 619-626

 

ISSN:0094-243X

 

年代: 1903

 

DOI:10.1063/1.1622536

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The CD‐SEM, which has been the major tool for critical dimension metrology for the last twenty years, now faces severe challenges to its utility and predominance. The problems that must be solved are outlined, and the possible scenarios for progress are described. © 2003 American Institute of Physics

 

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