Morphology and distribution of atomic steps on Si (001) studied with scanning tunneling microscopy
作者:
D. Dijkkamp,
A. J. Hoeven,
E. J. van Loenen,
J. M. Lenssinck,
J. Dieleman,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 1
页码: 39-41
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102640
出版商: AIP
数据来源: AIP
摘要:
We have studied the morphology and distribution of atomic steps on Si(001) with scanning tunneling microscopy. We find that native oxide removal at temperatures up to 1350 K leads to step pinning and bunching. Cleaning at temperatures above 1450 K leads to regular step distributions which reflect the macroscopic misorientation of the sample. Steps running parallel to the 2×1 dimer rows on the upper terrace are straight, whereas steps perpendicular to these rows are ragged.
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