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Morphology and distribution of atomic steps on Si (001) studied with scanning tunneling microscopy

 

作者: D. Dijkkamp,   A. J. Hoeven,   E. J. van Loenen,   J. M. Lenssinck,   J. Dieleman,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 56, issue 1  

页码: 39-41

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.102640

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have studied the morphology and distribution of atomic steps on Si(001) with scanning tunneling microscopy. We find that native oxide removal at temperatures up to 1350 K leads to step pinning and bunching. Cleaning at temperatures above 1450 K leads to regular step distributions which reflect the macroscopic misorientation of the sample. Steps running parallel to the 2×1 dimer rows on the upper terrace are straight, whereas steps perpendicular to these rows are ragged.

 

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