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Present status of the SORTEC SR Facility

 

作者: N. Atoda,   N. Awaji,   M. Kodaira,   T. Kishimoto,   J. Nishino,   K. Koga,   Y. Maejima,   I. Higashigawa,   K. Yanagida,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1992）
卷期: Volume 63, issue 1  

页码: 1611-1612

 

ISSN:0034-6748

 

年代: 1992

 

DOI:10.1063/1.1142992

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The status and performance of the SORTEC SR facility is described. Emphasis is placed on the reliable operation and the high performance of the SR source and the status of major systems for x‐ray lithography.

 

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