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On Quantitative Autoradiography of Semiconductor Basic Material

 

作者: H. G. Treutler,   K. Freyer,  

 

期刊: Isotopenpraxis Isotopes in Environmental and Health Studies  （Taylor Available online 1983）
卷期: Volume 19, issue 6  

页码: 202-204

 

ISSN:0021-1915

 

年代: 1983

 

DOI:10.1080/10256018308544884

 

出版商: Taylor & Francis Group

 

关键词: autoradiography;boron;dielectric track detectors;phosphorus;photographic film detectors;semiconductor materials;silicon;uses

 

数据来源: Taylor

 

摘要:

It will be described methods of the quantitative evaluation of elements interesting in semiconductor technology and their distribution in silicon using autoradiographic techniques. The local concentration of the element phosphorus in dependence of their local distribution is determined with silver halide films. As standard samples silicon disks phosphorus diffused are used.

 

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