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Hg ION implantation in silicon: Lattice disorder created and hg atom lattice location

 

作者: G.Della Mea,   A.V. Drigo,   P. Mazzoldi,   G. Nardelli,   R. Zannoni,  

 

期刊: Radiation Effects  (Taylor Available online 1970)
卷期: Volume 3, issue 2  

页码: 259-262

 

ISSN:0033-7579

 

年代: 1970

 

DOI:10.1080/00337577008236283

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The lattice disorder produced by 42-keV and 75-keV Hg ions implanted in Silicon at room temperature and the lattice location of the Hg atoms were studied by means of the channeling technique with a 2.0 MeV4He+beam. The damage produced was found to increase linearly with ion dose until a saturation value, connected to the ion range, is reached. The number of Si atoms displaced for Hg ion implanted was evaluated and compared with the theoretical expectation. The substitutional Hg fraction is connected to the disorder produced: the replacement mechanism is discussed.

 

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