Hg ION implantation in silicon: Lattice disorder created and hg atom lattice location
作者:
G.Della Mea,
A.V. Drigo,
P. Mazzoldi,
G. Nardelli,
R. Zannoni,
期刊:
Radiation Effects
(Taylor Available online 1970)
卷期:
Volume 3,
issue 2
页码: 259-262
ISSN:0033-7579
年代: 1970
DOI:10.1080/00337577008236283
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The lattice disorder produced by 42-keV and 75-keV Hg ions implanted in Silicon at room temperature and the lattice location of the Hg atoms were studied by means of the channeling technique with a 2.0 MeV4He+beam. The damage produced was found to increase linearly with ion dose until a saturation value, connected to the ion range, is reached. The number of Si atoms displaced for Hg ion implanted was evaluated and compared with the theoretical expectation. The substitutional Hg fraction is connected to the disorder produced: the replacement mechanism is discussed.
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