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Surface‐micromachined PbTiO3pyroelectric detectors

 

作者: D. L. Polla,   Chian‐ping Ye,   Takashi Tamagawa,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 59, issue 27  

页码: 3539-3541

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.105650

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Lead titanate (PbTiO3) thin‐film pyroelectric infrared detectors have been fabricated on polycrystalline silicon micromechanical membranes. Pyroelectric PbTiO3thin films of thickness ranging from 0.2 to 0.6 &mgr;m were prepared by sol‐gel spin casting techniques and deposited on 1.0‐&mgr;m‐thick polycrystalline silicon membranes suspended 1.0 &mgr;m above the surface of a silicon wafer. This composite structure offers high sensitivity and low thermal mass. The measured pyroelectric coefficient for 0.36‐&mgr;m‐thick PbTiO3films is 90 nC/cm2 K. The measured blackbody voltage responsivity for a pyroelectric element with an active area of 7×10−4cm2at 297 K and a chopping frequency of 50 Hz is 4.2×104V/W. The measured normalized detectivityD* at 297 K and 50 Hz is 1.0×109cm Hz1/2/W.

 

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