SIMPLE TECHNIQUE FOR VERY THIN SiO2FILM THICKNESS MEASUREMENTS
作者:
W. A. Pliskin,
R. P. Esch,
期刊:
Applied Physics Letters
(AIP Available online 1967)
卷期:
Volume 11,
issue 8
页码: 257-259
ISSN:0003-6951
年代: 1967
DOI:10.1063/1.1755124
出版商: AIP
数据来源: AIP
摘要:
The thickness of films (<900 Å) of silicon dioxide on silicon can be determined by observation near Brewster's angle for silicon with the light polarized in the plane of incidence. Since the intensity of the reflected light increases with thickness for these films, the measurement is made by direct comparison of the light reflected by a sample with a calibrated SiO2on silicon ``thickness gauge.'' Film thicknesses can be estimated to an accuracy of about±30 Å for thicknesses less than 150 Å and±50 Å for thicknesses between 150 Å and 900 Å.
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