Aspects of fatigue and rapid depolarization in thin film PZT capacitors
作者:
R. D. Nasby,
J. R. Schwank,
M. S. Rodgers,
S. L. Miller,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1992)
卷期:
Volume 2,
issue 1-4
页码: 91-104
ISSN:1058-4587
年代: 1992
DOI:10.1080/10584589208215735
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Discrepancies in switched polarization values obtained with pulse measurements and hysteresis measurements have been observed in ferroelectric PZT thin film capacitors. We attribute the differences as partially due to the effects of rapid depolarization. To measure rapid depolarization a pulse was applied to pole a ferroelectric capacitor; and then a second identical pulse of the same polarity was applied after a specified time. Significant switched charge was observed after the second pulse. This depolarization was observed to occur in the time frame from microseconds to seconds.Secondly, the effect of cycling voltage on fatigue was studied on several samples processed by different vendors. A strong dependence on voltage was obtained for one sample which was characterized using a voltage activation approach. A second sample showed no appreciable effect of cycling voltage on fatigue. The difference in behavior demonstrates that the dependence of the fatigue mechanism on voltage can vary significantly depending on the sample.
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