Ferromagnetic MnAs thin films grown on GaAs (001) substrates by molecular‐beam epitaxy have been studied by the methods of grazing incidence x‐ray scattering, x‐ray diffraction, and extended x‐ray‐absorption fine structure. Microstructures in two films prepared with different first‐layer growth conditions (template effects) are compared in terms of the interfacial roughness in the layer structure, lattice constants, epilayer thickness, local environment surrounding the Mn atoms, coordination number, and local disorder. Our results indicate that the template effects can cause significant differences in the local structures and crystallinity of the MnAs epitaxial layers. ©1996 American Institute of Physics.