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A simple and efficient internal heater for baking vacuum systems

 

作者: A. D. LeGrand,   E. F. Greene,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1983）
卷期: Volume 1, issue 3  

页码: 1556-1557

 

ISSN:0734-2101

 

年代: 1983

 

DOI:10.1116/1.572186

 

出版商: American Vacuum Society

 

关键词: vacuum systems;heaters;baking;power;efficiency

 

数据来源: AIP

 

摘要:

A simple and convenient method for baking a vacuum system is described which requires less power and shorter bakeout time as compared to conventional baking methods.

 

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