Superconducting YBa2Cu3O7films withTc=84 K were deposited on polished polycrystalline BeO substrate by reactive evaporation andinsituannealing in a low‐pressure oxygen atmosphere. By this process the surface quality of the films is the very same as the substrate. At low annealing temperature (TR=650 °C) the film is not textured but shows good superconducting properties. Thec‐axis orientation perpendicular to the plane of the substrate is observed forTR=780 °C.