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Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor

 

作者: Hal Edwards,   Larry Taylor,   Walter Duncan,   Allan J. Melmed,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 3  

页码: 980-984

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.365936

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report a new method of achieving tip–sample distance regulation in an atomic force microscope (AFM). A piezoelectric quartz tuning fork serves as both actuator and sensor of tip–sample interactions, allowing tip–sample distance regulation without the use of a diode laser or dither piezo. Such a tuning fork has a high spring constant so a dither amplitude of only 0.1 nm may be used to perform AFM measurements. Tuning-fork feedback is shown to operate at a noise level as low as that of a cantilever-based AFM. Using phase-locked-loop control to track excursions in the resonant frequency of a 32 kHz tuning fork, images are acquired at scan rates which are fast enough for routine AFM measurements. Magnetic force microscopy using tuning-fork feedback is demonstrated. ©1997 American Institute of Physics.

 

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