Structure transitions in amorphous silicon under laser irradiation
作者:
M. Bertolotti,
G. Vitali,
E. Rimini,
G. Foti,
期刊:
Journal of Applied Physics
(AIP Available online 1979)
卷期:
Volume 50,
issue 1
页码: 259-265
ISSN:0021-8979
年代: 1979
DOI:10.1063/1.325709
出版商: AIP
数据来源: AIP
摘要:
An amorphous to a polycrystal or a single‐crystal transition by ruby‐laser irradiation of amorphous Si, obtained through ion implantation, is discussed. Both free‐generation andQ‐switched laser mode operation are used. Under a free‐generation operation only the amorphous to polycrystal transition is obtained, which is attributed to nonthermal effects. In theQ‐switched mode both transitions are obtained. The single‐crystal transition is interpreted as due mainly to the melting of the amorphous layer.
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