Evaluation of electro-optic phenomena in ferroelectric thin films using ellipsometric techniques
作者:
B.G. Potter,
D. Dimos,
M.B. Sinclair,
S. Lockwood,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1995)
卷期:
Volume 11,
issue 1-4
页码: 59-68
ISSN:1058-4587
年代: 1995
DOI:10.1080/10584589508013579
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Reflection ellipsometry and computational modeling are used to examine electro-optic (EO) effects in a PZT (30/70) thin film. The combined influences of thin film etalon effects, the optical configuration used to measure electro-optic changes in the PZT/electrode thin film stack, and incoherent scattering within the layer structure are found to significantly influence the corresponding intensity modulation under an ac field. The impact of these findings on design considerations for EO-based devices and the use of photometric ellipsometry to characterize these materials is discussed.
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