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Evaluation of electro-optic phenomena in ferroelectric thin films using ellipsometric techniques

 

作者: B.G. Potter,   D. Dimos,   M.B. Sinclair,   S. Lockwood,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1995)
卷期: Volume 11, issue 1-4  

页码: 59-68

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508013579

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Reflection ellipsometry and computational modeling are used to examine electro-optic (EO) effects in a PZT (30/70) thin film. The combined influences of thin film etalon effects, the optical configuration used to measure electro-optic changes in the PZT/electrode thin film stack, and incoherent scattering within the layer structure are found to significantly influence the corresponding intensity modulation under an ac field. The impact of these findings on design considerations for EO-based devices and the use of photometric ellipsometry to characterize these materials is discussed.

 

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