Impact of changes in the Pt heterostructure bottom electrodes on the ferroelectric properties of SBT thin films
作者:
Seung-Hyun Kim,
D.J. Kim,
J. Im,
S.K. Streiffer,
O. Auciello,
J.P. Maria,
A.I. Kingon,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1999)
卷期:
Volume 26,
issue 1-4
页码: 253-268
ISSN:1058-4587
年代: 1999
DOI:10.1080/10584589908215626
出版商: Taylor & Francis Group
关键词: ferroelectricity;SBT;chemical solution deposition;surface roughness;Pt heter-ostructure;film/electrode interface
数据来源: Taylor
摘要:
The crystallinity and the microstructure of Sr0.8Bi2.3Ta2O9(SBT) thin films improved with increasing annealing temperature, and strongly influenced the ferroelectric properties. In addition, the properties of SBT films, such as remanent polarization and leakage current density, are closely related to the film/electrode interface and surface roughness of the underlying electrode. SBT films on Pt/TiO2/SiO2/Si and Pt/ZrO2/SiO2/Si substrates exhibited high remanent polarization, low leakage current density, and low voltage saturation as compared to SBT films on Pt/Ti/SiO2/Si substrates. This is deduced to be related to differences in film orientation, electrode roughness, and out-diffusion of Ti onto the surface of the bottom electrode.
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