The morphological change of vapor-deposited films of TPD (N, N′-diphenyl-N, N′-bis-(3-methylphenyl)-[1,1′-biphenyl]-4,4′-diamine) and Alq3 (Tris-(8-hydroxyquinoline) aluminum) and the interfacial degradation of Alq3/TPD bilayer were characterized by atomic force microscopy (AFM) and fluorescence spectroscopy, respectively, in the temperature range from room temperature to 80°C under an ambient atmosphere. The TPD and the Alq3 film are widely used as a hole transport and an emitter layer, respectively, in an organic electroluminescent device (an indium tin oxide (ITO) coated glass/TPD/Alq3/metal). As the substrate plate, an ITO coated glass or a slide glass was used in this work.