Superconducting YBa2Cu3O7−xfilms having smooth surfaces were successfully synthesized by a microwave plasma‐enhanced pulsed laser deposition (PEPLD) process. Particulates that frequently occurred in films grown by the conventional PLD process were effectively eliminated. The films were epitaxial‐like. Thec‐axis was perpendicular to the films’ surface, theaandbaxes were aligned in the films’ plane, and the onset and zero of the transition temperature were atTc=90 K andTc0=86 K, respectively. Optical emission spectroscopy indicated that the presence of oxygen plasma not only reexcited the laser‐induced species via the collision process, but also produced abundant atomic oxygen in PEPLD process. The surface reaction kinetics for the formation of the thin‐film process was thus greatly enhanced, which substantially improved the thin‐film quality. ©1995 American Institute of Physics.