We have developed a new analytical method, which we call the glancing‐incidence and glancing‐takeoff x‐ray fluorescence (GIT‐XRF) method. In this method, a fluorescent x ray is measured at various combinations of incident and takeoff angles. A nondestructive depth profiling is possible by using this GIT‐XRF method, because the effective observation depth is changed by both the incident and takeoff angles. Here, we introduce the idea of depth profiling using the GIT‐XRF method, and then we apply this method to an Au–Si interface reaction. ©1995 American Institute of Physics.