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Strain determination in heteroepitaxial GaN

 

作者: B. J. Skromme,   H. Zhao,   D. Wang,   H. S. Kong,   M. T. Leonard,   G. E. Bulman,   R. J. Molnar,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 6  

页码: 829-831

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119659

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Residual strains have been evaluated in a variety of GaN layers grown on sapphire or 6H-SiC from wafer curvature at 293 K, which avoids needing to know the unstrained lattice parameters or energy gap of GaN in advance. Estimated strains at 1.7 K are correlated with the energy of theAfree exciton to determine its strain dependence. We find that strain-free GaN has anAexciton energy of3.468±0.002 eVat 1.7 K, and 293 K lattice parametersa=3.1912 Åandc=5.1836 Å.These values imply that GaN on SiC is frequently under net biaxial compressive stress due to residual lattice mismatch stress, and that several hundred &mgr;m thick GaN layers on sapphire and homoepitaxial layers grown on bulk platelets grown at high pressure are both under about1×10−3in-plane compressive strain. These conclusions conflict with most previous assumptions. ©1997 American Institute of Physics.

 

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