首页   按字顺浏览 期刊浏览 卷期浏览 Submicrostructural clusters and doping of amorphous silicon
Submicrostructural clusters and doping of amorphous silicon

 

作者: J. C. Phillips,  

 

期刊: Journal of Applied Physics  (AIP Available online 1986)
卷期: Volume 59, issue 2  

页码: 383-387

 

ISSN:0021-8979

 

年代: 1986

 

DOI:10.1063/1.336640

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Experiments ona‐Si prepared by vapor deposition or ion bombardment exhibit anomalies which are most readily explained not by a continuous random network but by arrays of morphologically oriented paracrystalline clusters with 3% unreconstructed surface atoms. The effects of hydrogenation on the cluster dimensions are small compared to the effects of deposition or annealing temperature. Substantial morphological reorientation can be induced either by substrate‐driven strain or by thermal annealing. Further experiments to study cluster morphological transitions are proposed.

 

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