The reaction of polycarbosilane with tetra-alkyltitanate proceeded at 300° C in nitrogen atmosphere by the condensation of Si-H bonds in polycarbosilane and the substituent groups of the tetra-alkyltitanate accompanied by evolution of alkan gas, and then the formation of Si-O-Ti bonds occurred. In this condensation reaction using tetra-isopropyl titanate, tetra-n-butyl titanate and tetra-2-ethylhexyl titanate, activation energies of the initial rate of the increase in molecular weight were 17.04, 20.07 and 31.07 kcal mol−1respectively, and thus the more bulky the substituent group of tetra-alkyltitanate, the lower the reactivity became. Of these alkyltitanates, tetra-2-ethylhexyl titanate was found to be the most advantageous reactant for obtaining polytitanocarbosilane with a narrow molecular weight distribution, low gel fraction and high titanium concentration. Polytitanocarbosilane with high titanium concentration was converted into the densified amorphous inorganic material with high Si-C bonding energy in high yield. Titanium contained in the pyrolysed polytitanocarbosilane was furthermore found to have the effect of inhibiting crystalline grain growth of β-type SiC up to high temperat