Atomic force profiling by utilizing contact forces
作者:
R. Yang,
R. Miller,
P. J. Bryant,
期刊:
Journal of Applied Physics
(AIP Available online 1988)
卷期:
Volume 63,
issue 2
页码: 570-572
ISSN:0021-8979
年代: 1988
DOI:10.1063/1.340089
出版商: AIP
数据来源: AIP
摘要:
Atomic force microscopy (AFM) is a new technology currently being developed. Stylus profilometry (SP) was developed earlier. A procedure is reported here which combines features of both SP and AFM. In this approach a stylus scans a sample surface and responds to contact forces. Force values are maintained within the elastic range of the sample, and high resolution is achieved by means of a sensitive tunnel gap feedback circuit control. Initial tests of performance have been conducted over a range of applied loads with tungsten styluses on phlogopite mica samples to image lamellar steps with subnanometer resolution.
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