Dynamics of laser‐ablated particles in newly developed eclipse PLD
作者:
Hiroshi Nakatsuka,
Hiroshige Ishibashi,
Takeshi Kobayashi,
期刊:
AIP Conference Proceedings
(AIP Available online 1996)
卷期:
Volume 369,
issue 1
页码: 1286-1290
ISSN:0094-243X
年代: 1996
DOI:10.1063/1.50419
出版商: AIP
数据来源: AIP
摘要:
We have proposed the new PLD technique, called the ‘‘Eclipse PLD Method,’’ wherein the droplet problem (peculiar to the standard PLD technique) is almost completely removed. This method is characterizes by a simple placement of a shadow mask between the target and substrate. The present paper deals with traveling behavior of the ablated particles in the chamber and discloses the exclusive role of the shadow mask for elimination of the droplet particles. From comparison of the growth rates between the analysis and experiment, it was made clear that the neutral gas molecules serve as the dominant scatterer against the traveling ablated particles in the PLD, and consequently our eclipse‐method is basically supported by the intensive diffusion of growth species. ©1996 American Institute of Physics.
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