A simple, low‐cost, and flexible personal computer‐based automatic measurement system used for deep‐level transient spectroscopy (DLTS) is developed and implemented. An IEEE‐488 interface bus is designated for communication between the personal computer and instruments. This configuration provides advantages in ease of operation and quick set up, especially for the purpose of data acquisition and processing. In general, the system can be applied to any programmable measurement automatic configuration. A linear least‐square regression method is used to process the Arrhenius plot and to determine the activation energy. The DLTS signal and the Arrhenius plot are plotted and displayed during one thermal scan. A new DLTS computation algorithm has also been employed.