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Quantum interference devices made from superconducting oxide thin films

 

作者: R. H. Koch,   C. P. Umbach,   G. J. Clark,   P. Chaudhari,   R. B. Laibowitz,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 51, issue 3  

页码: 200-202

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.98922

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have fabricated superconducting quantum interference devices (dc SQUID’s) from thin films of the superconducting oxide YBa2Cu3Oy. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 &mgr;m loop and two 17‐&mgr;m‐wide weak links over a ∼1‐&mgr;m‐thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID’s. The SQUID’s were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to beh/2ein these materials.

 

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