Quantum interference devices made from superconducting oxide thin films
作者:
R. H. Koch,
C. P. Umbach,
G. J. Clark,
P. Chaudhari,
R. B. Laibowitz,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 51,
issue 3
页码: 200-202
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98922
出版商: AIP
数据来源: AIP
摘要:
We have fabricated superconducting quantum interference devices (dc SQUID’s) from thin films of the superconducting oxide YBa2Cu3Oy. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 &mgr;m loop and two 17‐&mgr;m‐wide weak links over a ∼1‐&mgr;m‐thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID’s. The SQUID’s were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to beh/2ein these materials.
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