Mechanical scan system for microscopic applications
作者:
H. J. B. Marsman,
R. Stricker,
R. W. Wijnaendts van Resandt,
G. J. Brakenhoff,
P. Blom,
期刊:
Review of Scientific Instruments
(AIP Available online 1983)
卷期:
Volume 54,
issue 8
页码: 1047-1052
ISSN:0034-6748
年代: 1983
DOI:10.1063/1.1137525
出版商: AIP
数据来源: AIP
摘要:
A high‐speed mechanical scanning stage for microscopic applications has been designed and constructed. It is especially suitable for high‐resolution confocal UV microscopy. It is a feedback design using electromagnetic actuators and piezoelectric sensors with motor‐driven screws for coarse adjustment. Scanning of areas up to 1 mm square at up to 300 lines per second is possible with positional resolution of better than 0.01 &mgr;m. An exceptionally stable optical system is also described.
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