The finite element method is applied to strain-induced islands. The distribution of the elastic energy in the island and the substrate is determined as a function of the island aspect ratio and inter-island distance. When the height-over-base ratio increases, the total elastic energy density decreases and the relative contribution of the substrate increases. When the inter-island distance decreases, the elastic energy density increases and the relative contribution of the substrate decreases. The influence of the aspect ratio on the relaxation rate is amplified for short inter-island distances. ©1998 American Institute of Physics.