首页   按字顺浏览 期刊浏览 卷期浏览 Directional laser recrystallization of eutectic Si‐CoSi2thin films
Directional laser recrystallization of eutectic Si‐CoSi2thin films

 

作者: B. M. Ditchek,   T. Emma,  

 

期刊: Applied Physics Letters  (AIP Available online 1984)
卷期: Volume 45, issue 9  

页码: 955-957

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.95455

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A method for the preparation of lamellae of Si and CoSi2using thin‐film eutectic solidification techniques is presented. In the experiment, a laser was used to melt and directionally solidify an alloyed film of Co and polycrystalline Si on a thermally oxidized Si wafer. Using traverse rates as rapid as 8 cm/s, 50‐nm‐wide CoSi2stripes, separated by comparable amounts of Si are obtained. An analysis of the chemistry and microstructure of the film before and after laser scanning is discussed.

 

点击下载:  PDF (245KB)



返 回