Directional laser recrystallization of eutectic Si‐CoSi2thin films
作者:
B. M. Ditchek,
T. Emma,
期刊:
Applied Physics Letters
(AIP Available online 1984)
卷期:
Volume 45,
issue 9
页码: 955-957
ISSN:0003-6951
年代: 1984
DOI:10.1063/1.95455
出版商: AIP
数据来源: AIP
摘要:
A method for the preparation of lamellae of Si and CoSi2using thin‐film eutectic solidification techniques is presented. In the experiment, a laser was used to melt and directionally solidify an alloyed film of Co and polycrystalline Si on a thermally oxidized Si wafer. Using traverse rates as rapid as 8 cm/s, 50‐nm‐wide CoSi2stripes, separated by comparable amounts of Si are obtained. An analysis of the chemistry and microstructure of the film before and after laser scanning is discussed.
点击下载:
PDF
(245KB)
返 回