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Kinetic modeling of the &agr; to &ggr; transition in radio frequency discharges

 

作者: G. J. Parker,   W. N. G. Hitchon,   J. E. Lawler,  

 

期刊: Physics of Fluids B: Plasma Physics  (AIP Available online 1993)
卷期: Volume 5, issue 2  

页码: 646-649

 

ISSN:0899-8221

 

年代: 1993

 

DOI:10.1063/1.860496

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An accurate and comprehensive self‐consistent kinetic model is applied to a helium radio frequency (rf) discharge which in experiments exhibits an ‘‘&agr; to &ggr;’’ transition. The main conclusions are (i) there is good agreement (factor of 2) between the experiment and simulation in plasma density, power density, and current density across two orders of magnitude of the applied voltage. (ii) The bulk electron temperature exhibits a transition from high at low driving voltages to low at high voltages. The low‐voltage regime exhibits a larger bulk electric field in the simulation. (iii) Multistep ionization is important under all conditions studied.

 

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