Kinetic modeling of the &agr; to &ggr; transition in radio frequency discharges
作者:
G. J. Parker,
W. N. G. Hitchon,
J. E. Lawler,
期刊:
Physics of Fluids B: Plasma Physics
(AIP Available online 1993)
卷期:
Volume 5,
issue 2
页码: 646-649
ISSN:0899-8221
年代: 1993
DOI:10.1063/1.860496
出版商: AIP
数据来源: AIP
摘要:
An accurate and comprehensive self‐consistent kinetic model is applied to a helium radio frequency (rf) discharge which in experiments exhibits an ‘‘&agr; to &ggr;’’ transition. The main conclusions are (i) there is good agreement (factor of 2) between the experiment and simulation in plasma density, power density, and current density across two orders of magnitude of the applied voltage. (ii) The bulk electron temperature exhibits a transition from high at low driving voltages to low at high voltages. The low‐voltage regime exhibits a larger bulk electric field in the simulation. (iii) Multistep ionization is important under all conditions studied.
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