Role of mobile hydrogen in the amorphous silicon recrystallization
作者:
C. Godet,
N. Layadi,
P. Roca i Cabarrocas,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 23
页码: 3146-3148
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113704
出版商: AIP
数据来源: AIP
摘要:
The plasma deposition of nanocrystalline silicon thin films is usually performed under a high flux of atomic hydrogen and hydrogenated chemical species. The growth mechanisms are investigated using the layer‐by‐layer deposition of dense nanocrystalline silicon, obtained at 250 °C by alternating SiH4and H2plasmas. In the steady state, a minimum exposure time to the hydrogen plasma is necessary to recrystallize the amorphous top layer (10–85 A˚). It is shown that this critical time is determined by the diffusion time of some mobile H through the topa‐Si:H layer. The recrystallization is discussed in relation to the diffusion of hydrogen leading to the nanovoid and broken bond formation processes. ©1995 American Institute of Physics.
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