Formation and characterization of diamond crystals synthesized by microwave plasma CVD system
作者:
Han‐Chang Shin,
Chia‐Pin Sung,
Yung‐Sen Tang,
期刊:
Journal of the Chinese Institute of Engineers
(Taylor Available online 1990)
卷期:
Volume 13,
issue 6
页码: 697-702
ISSN:0253-3839
年代: 1990
DOI:10.1080/02533839.1990.9677302
出版商: Taylor & Francis Group
关键词: diamond;microwave plasma CVD;synthesis;cubo‐octahedron
数据来源: Taylor
摘要:
Diamond crystals have been successfully synthesized on (100) Si wafer using microwave plasma CVD. The growth was conditioned in a flowing system in which the parameters, such as CH4/H2ratio, pressure, temperature and microwave power were varied. Cubo‐octahedra or tetrakaidecahedra are the equilibrium shape of diamond single crystals obtained under all conditions and are therefore the basic unit for the formation of polycrystalline diamond films, mostly through repetitive twinning and secondary growth of diamond crystals on {100} habit planes of cubo‐octahedra. Both X‐ray diffraction and Raman spectroscopy were used to facilitate the analysis of the diamond crystallinity and purity. These qualities are similar to those of natural diamonds.
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