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Theory for the etching of organic materials by ultraviolet laser pulses

 

作者: R. Sauerbrey,   G. H. Pettit,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 5  

页码: 421-423

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101884

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A theoretical description of the ultraviolet laser etching process is developed. The threshold for laser ablation is reached when the density of absorbed photons is approximately equal to the density of chromophores in the material. Saturation of the absorption coefficient, absorption by the plume of ablated products, and multiphoton effects are considered. Agreement with all available experimental etch data, including femtosecond ultraviolet laser ablation, is found. The description is based on an analysis of the radiation transport at high intensities and is independent of the question as to whether ultraviolet laser ablation is photochemical or thermal.

 

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