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Vacuum Pumping Equipment and Systems

 

作者: H. M. Sullivan,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1948)
卷期: Volume 19, issue 1  

页码: 1-15

 

ISSN:0034-6748

 

年代: 1948

 

DOI:10.1063/1.1741049

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Typical rotary mechanical pumps, booster pumps, and diffusion pumps available today are described. Fundamental operating principles are discussed. The method for making theoretical computations of the conductance and speed of evacuation of a vacuum system is outlined.

 

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