The temperature dependence of the surface peaks of the (001) SrTiO3substrate surfaces was studied for the sample temperature up to 750 °C by channeling. The temperature dependence of the Sr surface peaks was found to be due to the thermal vibration of the Sr atoms. However, an anomalous temperature dependence of the Ti surface peak was observed which may be due to the displacement of Ti surface atoms. The Ti surface peaks are maximum at 400 °C. For the reduced SrTiO3−&dgr;, surface reconstruction was observed on the Sr surface sublattice but the anomalous temperature dependence of the Ti surface peak disappeared. ©1995 American Institute of Physics.