The effects of substrate bias on plasma parameters in an electron cyclotron resonance plasma reactor
作者:
John B. O. Caughman,
William M. Holber,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 3113-3118
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577181
出版商: American Vacuum Society
关键词: SUBSTRATES;ELECTRON TEMPERATURE;ELECTRON DENSITY;PLASMA SOURCES;ECR HEATING;RF SYSTEMS;PLASMA−WALL INTERACTIONS;HIGH−FREQUENCY DISCHARGES
数据来源: AIP
摘要:
The effect of substrate bias on plasma parameters has been studied for an electron cyclotron resonance plasma under typical materials processing conditions. Substrate conditions include floating with respect to the plasma, negative dc bias, or capacitively coupled rf bias. It has been found that the dc‐bias can profoundly affect the electron density, the electron temperature, and the plasma potential, well into the bulk of the plasma. The rf bias is found to be generally less perturbative, though can still cause significant change in the plasma potential. Changing the rf bias frequency appears to alter the effects on the bulk plasma.
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