Neutron reflectivity from a silicon nitride layer on a silicon substrate
作者:
C.D. Ashworth,
S. Messoloras,
R.J. Stewart,
J.G. Wilkes,
I.S. Baldwin,
J. Penfold,
期刊:
Philosophical Magazine Letters
(Taylor Available online 1989)
卷期:
Volume 60,
issue 2
页码: 57-65
ISSN:0950-0839
年代: 1989
DOI:10.1080/09500838908206436
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The neutron reflectivity from a sample consisting of a silicon nitride layer on a crystalline silicon substrate has been measured. The structure of the sample normal to the reflecting surface has been modelled to produce a scattering length density profile whose simulated reflectivity closely matches that experimentally determined. The layer thickness and the corresponding interface structures are detailed. Two modelling techniques have been used, one based on the well known Born and Wolf matrices and the other based on the Abeles method. The two techniques are compared and the sensitivity of the two techniques are discussed.
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