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A high power radio frequency transformer for plasma production in a toroidal plasma source

 

作者: B. C. Zhang,   R. C. Cross,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1998)
卷期: Volume 69, issue 1  

页码: 101-108

 

ISSN:0034-6748

 

年代: 1998

 

DOI:10.1063/1.1148484

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A high power rf transformer has been developed and implemented for the purpose of plasma production in a toroidal plasma source, PLADEPUS (plasma deposition at the University of Sydney), which is designed for plasma processing experiments. The plasma can be generated, either in a pulsed or a continuous mode, at electron densities up to about1013cm−3. The results show that rf power can be efficiently transferred to the plasma through the magnetic coupling of the transformer ferrite core. ©1998 American Institute of Physics.

 

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