A high power radio frequency transformer for plasma production in a toroidal plasma source
作者:
B. C. Zhang,
R. C. Cross,
期刊:
Review of Scientific Instruments
(AIP Available online 1998)
卷期:
Volume 69,
issue 1
页码: 101-108
ISSN:0034-6748
年代: 1998
DOI:10.1063/1.1148484
出版商: AIP
数据来源: AIP
摘要:
A high power rf transformer has been developed and implemented for the purpose of plasma production in a toroidal plasma source, PLADEPUS (plasma deposition at the University of Sydney), which is designed for plasma processing experiments. The plasma can be generated, either in a pulsed or a continuous mode, at electron densities up to about1013cm−3. The results show that rf power can be efficiently transferred to the plasma through the magnetic coupling of the transformer ferrite core. ©1998 American Institute of Physics.
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