2.5 kHz high repetition rate XeCl excimer laser
作者:
S. Takagi,
N. Okamoto,
K. Kakizaki,
S. Sato,
T. Goto,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 68,
issue 11
页码: 5927-5929
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.346922
出版商: AIP
数据来源: AIP
摘要:
An XeCl excimer laser was operated at the high repetition rate of 2.5 kHz, which can circulate the laser gas uniformly and efficiently. The characteristics of the gas flow rate and the average laser power versus the repetition rate were investigated in both He and Ne buffer gas mixtures. In He buffer gas, the average laser power saturates at 1.3 kHz and, thereafter, drops abruptly. On the other hand, stable operation at the highest repetition rate, 2.5 kHz, has been attained in Ne buffer at a gas flow rate of 54 m/s with an average laser power of 87 W.
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