PtSi–n–Si Schottky‐barrier photodetectors with stable spectral responsivity in the 120–250 nm spectral range
作者:
K. Solt,
H. Melchior,
U. Kroth,
P. Kuschnerus,
V. Persch,
H. Rabus,
M. Richter,
G. Ulm,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 24
页码: 3662-3664
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.117016
出版商: AIP
数据来源: AIP
摘要:
Front‐illuminated PtSi–n–Si Schottky barrier photodiodes have been developed for the ultraviolet and vacuum ultraviolet spectral range. Their spectral responsivity was determined in the 120–500 nm spectral range by use of a cryogenic electrical substitution radiometer operated with spectrally dispersed synchrotron radiation. For wavelengths below 250 nm, the spectral responsivity is about 0.03 A/W, comparable to that of GaAsP Schottky photodiodes. Unlike the GaAsP diodes, the new PtSi–n–Si diodes have a spatially uniform response which is virtually stable after prolonged exposure to short wavelength radiation. Even after a radiant exposure of 150 mJ cm−2at wavelength 120 nm, the relative reduction in spectral responsivity remains below 0.2%. Due to these features, this type of photodiode is a promising candidate for use as secondary detector standard in the ultraviolet and vacuum ultraviolet spectral ranges. ©1996 American Institute of Physics.
点击下载:
PDF
(183KB)
返 回