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Cathodoluminescence measurement of an orientation dependent aluminum concentration in AlxGa1−xAs epilayers grown by molecular beam epitaxy on a nonplanar substrate

 

作者: Michael E. Hoenk,   Howard Z. Chen,   Amnon Yariv,   Hadis Morkoc¸,   Kerry J. Vahala,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 54, issue 14  

页码: 1347-1349

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.100711

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Cathodoluminescence scanning electron microscopy is used to study AlxGa1−xAs epilayers grown on a nonplanar substrate by molecular beam epitaxy. Grooves parallel to the [011¯] direction were etched in an undoped GaAs substrate. Growth on such grooves proceeds on particular facet planes. We find that the aluminum concentration in the epilayers is dependent on the facet orientation, changing by as much as 35% from the value in the unpatterned areas. The transition in the aluminum concentration at a boundary between two facets is observed to be very abrupt.

 

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