Experimental investigation and characterization of the departure from local thermodynamic equilibrium along a surface‐wave‐sustained discharge at atmospheric pressure
作者:
M. D. Calzada,
M. Moisan,
A. Gamero,
A. Sola,
期刊:
Journal of Applied Physics
(AIP Available online 1996)
卷期:
Volume 80,
issue 1
页码: 46-55
ISSN:0021-8979
年代: 1996
DOI:10.1063/1.362748
出版商: AIP
数据来源: AIP
摘要:
Surface‐wave‐sustained discharges (SWDs) form a particular class of high frequency (HF) discharges: their HF sustaining field is provided by a traveling wave that transfers energy as it propagates along the discharge column, yielding a plasma column with an axially decreasing electron density. SWDs have proved to be ideal for investigating experimentally and theoretically both the HF field and discharge aspects of HF plasma sources at reduced gas pressure. In this article, SWDs are utilized at atmospheric pressure to gain insight into the departure from thermodynamic equilibrium (TE) of HF sustained discharges. This departure is found to increase significantly as the electron density decreases along the plasma column whereas the gas temperature and the power absorbed per electron do not vary axially. The two‐temperature plasma model provides an adequate description of this departure from TE. ©1996 American Institute of Physics.
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