Activation of arsenic‐implanted silicon using an incoherent light source
作者:
R. A. Powell,
T. O. Yep,
R. T. Fulks,
期刊:
Applied Physics Letters
(AIP Available online 1981)
卷期:
Volume 39,
issue 2
页码: 150-152
ISSN:0003-6951
年代: 1981
DOI:10.1063/1.92642
出版商: AIP
数据来源: AIP
摘要:
We report that continuous, incoherent light from a xenon arc lamp can be used to completely activate implanted Si (100) samples (75As+:100 keV, 1×1015cm−2) with negligible dopant redistribution and excellent uniformity (sheet resistivity variation less than ±2% over a 3‐in.‐diam wafer). An entire 3‐in. wafer could be activated in only about 10 sec without relative motion of wafer and light beam. The extent to which implant damage was removed by the incoherent light anneal is qualitatively indicated by the carrier mobilities which were within 10% of single‐crystal values.
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