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Continuum modeling of radio‐frequency glow discharges. I. Theory and results for electropositive and electronegative gases

 

作者: Evangelos Gogolides,   Herbert H. Sawin,  

 

期刊: Journal of Applied Physics  (AIP Available online 1992)
卷期: Volume 72, issue 9  

页码: 3971-3987

 

ISSN:0021-8979

 

年代: 1992

 

DOI:10.1063/1.352250

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A self‐consistent continuum (fluid) model for a radio‐frequency discharge is presented. The model is one dimensional, incorporates an electron energy balance, and is valid for both electropositive and electronegative discharges. A connection of the fluid model with the underlying physics is presented: issues such as the derivation of the fluid equations from moments of the Boltzmann equation, the closure of the set of moments, and the fundamental assumptions behind the fluid equations are discussed. A detailed set of results for an electropositive and an electronegative discharge is presented, and contrasted. The sustaining mechanisms and the electrical characteristics of the two discharges are also discussed. Comparison with experimental data of spatially and temporally resolved plasma induced emission is successfully done.

 

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