首页   按字顺浏览 期刊浏览 卷期浏览 Empirical and numerical calculations in two dimensions for predicting the performance o...
Empirical and numerical calculations in two dimensions for predicting the performance of a single stage turbomolecular pump

 

作者: T. N. Schneider,   S. Katsimichas,   C. R. E. de Oliveira,   A. J. H. Goddard,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1998)
卷期: Volume 16, issue 1  

页码: 175-180

 

ISSN:0734-2101

 

年代: 1998

 

DOI:10.1116/1.580965

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

Empirical formulae for the compression ratio and speed factor of a single stage turbomolecular pump operating in the molecular flow regime are developed for blade speeds lower than the most probable molecular velocity. These formulae are based on Becker’s compression formula derived from drag theory and on Bernhardt’s pumping speed formula but are modified and extended to take account of the full range of parameters in the two dimensional infinite blade row model of Kruger. Numerical constants are determined using the direct simulation Monte Carlo method. Results from the latter method are presented as contour plots of transmission probabilities intended to cover cases of interest for design calculations.

 

点击下载:  PDF (143KB)



返 回