A space‐charge mapping technique was used to measure the space charge and internal electric fields in metal–poly(ethylene terephthalate)–metal samples subjected to electric field stressing. From these results the role of electronic injection and transport in the observed electrical properties of capacitor structures could be inferred. Below breakdown fields, there was no evidence that the dark current can be attributed to electronic processes. As breakdown fields were approached, a decrease in the injected space charge trapped adjacent to the electrode was observed. This behavior was attributed to the onset of tunneling into high‐energy electronic states in the polymer. This process may produce large current densities leading to dielectric breakdown.