Synthesis and characterization of cluster-assembled carbon thin films
作者:
P. Milani,
M. Ferretti,
P. Piseri,
C. E. Bottani,
A. Ferrari,
A. Li Bassi,
G. Guizzetti,
M. Patrini,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 11
页码: 5793-5798
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.366446
出版商: AIP
数据来源: AIP
摘要:
Nanostructured carbon thin films have been produced by deposition of supersonic cluster beams. The clusters are generated by a pulsed arc cluster ion source modified in order to achieve high fluxes and stability. Scanning electron microscopy, Raman, and optical spectroscopy show that the films are a low density network of nanometer-size particles. The nature of the films is essentially graphite-like with a large number of distorted bonds. The formation of structures based onsp3bondings is not observed. The use of cluster beam deposition for the synthesis of nanocrystalline thin films is discussed. ©1997 American Institute of Physics.
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