Magnetic field dependence of sputtering magnetron efficiency
作者:
J. Goree,
T. E. Sheridan,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 9
页码: 1052-1054
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.106342
出版商: AIP
数据来源: AIP
摘要:
A Monte Carlo simulation of electron transport is used to predict the dependence of the ionization efficiency on the magnetic field strength of a planar magnetron. This offers insight into the operation of the magnetron, and it also provides two valuable practical results. First, the efficiency increases with field strength only up to a saturation level. Operating a magnetron with a stronger field strength would only lead to an undesirable loss of target utilization. Second, a scaling law is found that is useful for designing magnetrons of different sizes.
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