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Magnetic field dependence of sputtering magnetron efficiency

 

作者: J. Goree,   T. E. Sheridan,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 59, issue 9  

页码: 1052-1054

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.106342

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A Monte Carlo simulation of electron transport is used to predict the dependence of the ionization efficiency on the magnetic field strength of a planar magnetron. This offers insight into the operation of the magnetron, and it also provides two valuable practical results. First, the efficiency increases with field strength only up to a saturation level. Operating a magnetron with a stronger field strength would only lead to an undesirable loss of target utilization. Second, a scaling law is found that is useful for designing magnetrons of different sizes.  

 

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