Single‐crystal Si films on SiO2prepared by using a stationary graphite heater for lateral epitaxy by seeded solidification
作者:
John C. C. Fan,
B.‐Y. Tsaur,
M. W. Geis,
期刊:
Applied Physics Letters
(AIP Available online 1981)
卷期:
Volume 39,
issue 4
页码: 308-310
ISSN:0003-6951
年代: 1981
DOI:10.1063/1.92724
出版商: AIP
数据来源: AIP
摘要:
Continuous single‐crystal Si films on SiO2have been prepared by a simplified version of the technique for lateral epitaxy by seeded solidification (LESS). The new method employs transient heating by a simple stationary graphite heater, while the original method utilized two graphite heaters, one of which was moved during LESS processing. The Si films obtained by the one‐heater method are comparable in crystal quality to those prepared by the two‐heater method.
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