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Single‐crystal Si films on SiO2prepared by using a stationary graphite heater for lateral epitaxy by seeded solidification

 

作者: John C. C. Fan,   B.‐Y. Tsaur,   M. W. Geis,  

 

期刊: Applied Physics Letters  (AIP Available online 1981)
卷期: Volume 39, issue 4  

页码: 308-310

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92724

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Continuous single‐crystal Si films on SiO2have been prepared by a simplified version of the technique for lateral epitaxy by seeded solidification (LESS). The new method employs transient heating by a simple stationary graphite heater, while the original method utilized two graphite heaters, one of which was moved during LESS processing. The Si films obtained by the one‐heater method are comparable in crystal quality to those prepared by the two‐heater method.

 

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