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Generation mechanism of distortion aberration in a symmetric magnetic doublet for an electron beam projection system

 

作者: Mamoru Nakasuji,   Hiroyasu Shimizu,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 4  

页码: 2467-2473

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.588755

 

出版商: American Vacuum Society

 

关键词: BEAM OPTICS;ELECTRON BEAMS;GEOMETRICAL ABERRATIONS;MAGNETIC FIELDS;KEV RANGE 10−100;COMPUTERIZED SIMULATION

 

数据来源: AIP

 

摘要:

Radial and azimuthal distortion aberrations are increasingly a function of the image side lens bore radius in the range from 1.25 to 5 times as large as the maximum image field radius. This phenomenon is inconsistent with our previous understanding. An assumption is made that these large distortions for the large bore radii come from the influence of the magnetic field of one on the other, thereby destroying the symmetry. This assumption is confirmed from the following simulation. When these distortions are calculated for the ideal case where the magnetic fields are calculated in the condition without the other lens, they are decreased to around 1/10 of those for the case where the magnetic fields are calculated in the real condition with the lenses in proximity. When the object–image distance is 800 mm and the bore radii of lens 1 are 100 and 20 mm, the residual radial and azimuthal distortions are 1.5 and 0.7 nm, the beam blur is smaller than 45 nm for the beam semiangle from 0.05 to 0.7 mrad, where the main‐field and subfield sizes in the image plane are 20 mm and 250 μm, respectively, the beam energy is 100 keV, and the space charge effects are neglected.

 

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